Å©¸°·ëÀÇ°ü¸®
Room | ¾Ð·ÂÂ÷ |
---|---|
ûÁ¤µµ Class°¡ ´Ù¸¥ Clean Room | 0.5 |
Clean Room°ú Cleanº¹µµ . °»ÀÇ½Ç | 0.5~1.0 |
Clean . °»ÀÇ½Ç µî°ú ÀÏ¹Ý½Ç | 1.0 |
Clean Room°ú ÀÏ¹Ý½Ç | 1.5 |
ûÁ¤µµ | ȯ±âȸ¼ö(ȸ/h) |
---|---|
Class 100 | 200~600 |
1,000 | 50~70 |
10,000 | 30~40 |
100,000 | 20~30 |
Áß·®¹ý (AFI) |
Air Filter Institute Dust Weight Arrest EFF. 1¥ìmÀÌ»ó Á¦ÁøÀÔÀÚ¿¡ Àû¿ë Pre Filter, ¿Ü±âó¸® Filter |
---|---|
ºñ»ö¹ý (NBS) |
National Bureau of Standard Dust Spot Efficiency 1¥ìmÀÌÇÏ Á¦ÁøÀÔÀÚ¿¡ Àû¿ë Mediun Filter |
°è¼ö¹ý (DOP) |
Diocty Phthalate Fractional Efficiency 1¥ìmÀÌÇÏ Á¦ÁøÀÔÀÚ¿¡ Àû¿ë Hepa Filter, ULPA Filter |
¿òÁ÷ÀÔ ¾øÀ½(±â¸³ ¶Ç´Â Âø¼®) | 100,000 | |
---|---|---|
°¡º¿î µÎ, ¼ö, ÆÈÀÇ ¿òÁ÷ÀÓ(Âø¼®) | 500,000 | |
¸ö, ÆÈÀÇ º¸Åë¿òÁ÷ÀÓ, ¹ß³¡À¸·Î ¸¶·ç¸¦ ¶§¸²(Âø¼®) | 1,000,000 | |
Âø¼®¿¡¼ ±â¸³ÇÏ´Â µ¿ÀÛ | 2,500,000 | |
º¸Çà | ||
3.2km/hr(´À¸®°Ô) | 5,000,000 | |
5.7km/hr(º¸Åë) | 7,500,000 | |
8km/hr(ºü¸£°Ô) | 10,000,000 | |
°è´ÜÀ» ¿À¸£´Â µ¿ÀÛ | 10,000,000 | |
µµ¾àµ¿ÀÛ | 15,000,000~30,000,000 |
Class | Contamination Level/ft3 Fabric |
---|---|
A | Less than 1,000 5Micron & Larger Particles |
Maximum 10Fibers | |
B | Less than 5,000 5Micron & Larger Particles |
Maximum 25Fibers | |
C | Less than 10,000 5Micron & Larger Particles |
Maximum 50Fibers | |
D | Less than 15,000 5Micron & Larger Particles |
Maximum 50Fibers | |
E | Less than 25,000 5Micron & Larger Particles |
Maximum 175Fibers |