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CREAN ROOMÀÇ °¢½Ç°£ÀÇ ÇÊ¿ä¾Ð·ÂÂ÷
Room ¾Ð·ÂÂ÷
ûÁ¤µµ Class°¡ ´Ù¸¥ Clean Room 0.5
Clean Room°ú Cleanº¹µµ . °»ÀÇ½Ç 0.5~1.0
Clean . °»ÀÇ½Ç µî°ú ÀÏ¹Ý½Ç 1.0
Clean Room°ú ÀÏ¹Ý½Ç 1.5
CREAN ROOMÀÇ CLASSº° Ç¥ÁØÀû ¼øȯdz·®
ûÁ¤µµ ȯ±âȸ¼ö(ȸ/h)
Class 100 200~600
1,000 50~70
10,000 30~40
100,000 20~30

FILTERÀÇ ÃøÁ¤¹ýÀÇÁ¾·ù
Áß·®¹ý
(AFI)
Air Filter Institute
Dust Weight Arrest EFF.
1¥ìmÀÌ»ó Á¦ÁøÀÔÀÚ¿¡ Àû¿ë
Pre Filter, ¿Ü±âó¸® Filter
ºñ»ö¹ý
(NBS)
National Bureau of Standard
Dust Spot Efficiency
1¥ìmÀÌÇÏ Á¦ÁøÀÔÀÚ¿¡ Àû¿ë
Mediun Filter
°è¼ö¹ý
(DOP)
Diocty Phthalate
Fractional Efficiency
1¥ìmÀÌÇÏ Á¦ÁøÀÔÀÚ¿¡ Àû¿ë
Hepa Filter, ULPA Filter
ÀÔÀڹ߻ý¼ö
¿òÁ÷ÀÔ ¾øÀ½(±â¸³ ¶Ç´Â Âø¼®) 100,000
°¡º­¿î µÎ, ¼ö, ÆÈÀÇ ¿òÁ÷ÀÓ(Âø¼®) 500,000
¸ö, ÆÈÀÇ º¸Åë¿òÁ÷ÀÓ, ¹ß³¡À¸·Î ¸¶·ç¸¦ ¶§¸²(Âø¼®) 1,000,000
Âø¼®¿¡¼­ ±â¸³ÇÏ´Â µ¿ÀÛ 2,500,000
º¸Çà
3.2km/hr(´À¸®°Ô) 5,000,000
5.7km/hr(º¸Åë) 7,500,000
8km/hr(ºü¸£°Ô) 10,000,000
°è´ÜÀ» ¿À¸£´Â µ¿ÀÛ 10,000,000
µµ¾àµ¿ÀÛ 15,000,000~30,000,000
CLEAN ROOMÀÇ CLASSº° Ç¥ÁØÀû ¼øȯdz·®
Class Contamination Level/ft3 Fabric
A Less than 1,000 5Micron & Larger Particles
Maximum 10Fibers
B Less than 5,000 5Micron & Larger Particles
Maximum 25Fibers
C Less than 10,000 5Micron & Larger Particles
Maximum 50Fibers
D Less than 15,000 5Micron & Larger Particles
Maximum 50Fibers
E Less than 25,000 5Micron & Larger Particles
Maximum 175Fibers